2024/5/29 -The "Etching Gas Market" is anticipated to experience robust growth, with projections estimating it will reach USD XX.X Billion by 2030.
2024/5/15 -Etching: Gases like SF6 and NF3 etch intricate patterns on wafers through plasma and reactive ion etching, removing unwanted material with precision. Doping ...
2024/5/21 -Here, a solvent-free one-step gas-phase dry etching method, named “Gas-Phase Selective Etching”, was first proposed and used to etch different elements A (Al, ...
2024/5/12 -Cryogenic etching tools 'drill holes' three times faster than conventional tools, a capability that will be instrumental for 3D NAND with over 400 active layers ...
2024/5/10 -This study presents a relatively non-toxic, low-cost, and eco-friendly dry etching process for Si-based dielectrics using only H2 gas in comparison with the ...
3日前 -Acetic Acid CH3COOH General Information Acetic Acid as surfactant and buffer is a commonly used additive for various etching mixtures.
Huawei's photolithography machine exposed，Gas etching method achieves 1nm，SMIC orders 500 units. 2.5K views · 6 days ago ...more ...
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4日前 -Purge: the excess gas molecules are purged; Etch: the modified layer is removed by low energy plasma; Purge: the removal byproduct are purged ...
2024/5/17 -This report details the etching process of a monocrystalline silicon substrate using surface discharge plasma generated at varying gas flow rates of Ar/CF4 ...
2024/5/13 -To increase the etch selectivity of Si3N4 over SiO2, this study investigated their etching properties, including etch rate and selectivity in NF3 and O2 gases, ...