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This video demonstrats the proper operation of the PECVD machine.
Turn on the water chiller.
Power on the PECVD equipment.
Open the chamber and place the sample on the working stage.
Turn on the mechanical pump and open the angle valve to vacuum the chamber to less than 10Pa.
Then close the angle valve, turn on/ open the backing valve, molecular pump and the gate valve to further vacuum the chamber to 5.4 x 10^-4Pa.
Adjust the position of the working stage and start heating the stage.
Temperature Controller
Turn on and set up the RF power.
Turn off the power and retrieve the sample.
Place gear, 1st sealing ring, pressing ring, 2nd sealing ring, and flange by order
Adjust tube position and tighten flange
Put sealing ring in the flange. Install the flange and tighten the screws
Tighten the screw in order to raise tube to make sure two sides are on the same level
Use the clamp to connect the magnetic fluid and the flange, and tighten the screws
Install the anti-corrosive vacuum gauge
Install magnetic fluid and tighten with the clamp
Connect the flange with the magnetic fluid
Connect gas tank and flange just installed using the tube provided
Connect power cords and water cooling pipe with the machine