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ZEISS Crossbeam laser Introducing the LaserFiB workflow for massive material ablation
Access deeply buried regions of interest using a femtosecond (fs) laser
Position the sample in the SEM.
Find your ROI by correlating with 3D data, eg. X-ray microscopy data
cquire a reference image in the SEM
SEM and sample coordinate systems are now locked.
Transfer the sample holder to the airlock A fs laser is attached to the system.
Define your targeted ROI for the laser ablation process. The laser quickly removes material until the ROI is reached
Return the sample to the SEM chamber.
Perform final FIB polishing and complete your SEM analysis.